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Advanced Surface Polishing Techniques
TopicLeading institutions, researchers & key papers
This cluster of papers focuses on the techniques, mechanisms, and simulations related to chemical mechanical polishing (CMP) in the context of microelectronics manufacturing. It covers topics such as material removal mechanisms, molecular dynamics simulation, ultra-precision grinding, surface and subsurface damage, nanometric cutting, magnetorheological finishing, polishing slurry chemistry, and tool wear.
124
Works
IDs:OpenAlex
How has Advanced Surface Polishing Techniques's publication output changed over time?
ScholarIQpublication output · 1998–2020
Output grew0% over the shown period — from 1 works in 1998 to 1 in 2020.
1
3
3
1
1
1
1
1
2
1
1998199920022004200520152016201820192020
What are the most-cited papers on Advanced Surface Polishing Techniques?
ScholarIQmost cited works
Influence of microstructure on the cutting behaviour of silicon
Saurav Goel, A. M. Kovalchenko, Alexander Stukowski, Graham L. W. Cross
S64016596. 2016214 CitationsOPEN ACCESS
Some recent developments in mechanical activation and mechanosynthesis
Éric Gaffet, Frédéric Bernard, J.C. Niepce, F. Charlot, Christophe Gras, G. Le Caër, J.L. Guichard, P. Delcroix, Alain Mocellin, Olivier Tillement
S45305740. 1999173 Citations
Contact Mechanics and Lubrication Hydrodynamics of Chemical Mechanical Polishing
John Tichy, Joseph A. Levert, Lei Shan, S. Danyluk
S138759888. 1999152 CitationsOPEN ACCESS
Rapid characterization and modeling of pattern-dependent variation in chemical-mechanical polishing
B.E. Stine, Dennis O. Ouma, R. Divecha, Duane S. Boning, J.E. Chung, Dale L. Hetherington, C.R. Harwoo, O.S. Nakagawa, Soo‐Young Oh
S14676311. 1998139 Citations
Micro machining glass with polycrystalline diamond tools shaped by micro electro discharge machining
Chris Morgan, R. Ryan Vallance, Eric R. Marsh
S170809390. 2004124 Citations
Where is Advanced Surface Polishing Techniques research published, and who funds it?
ScholarIQvenues & funding sources
TOP JOURNALS
S64016596214
S45305740173
S138759888152
S14676311139
S170809390124
TOP FUNDERS
National Science Foundation—
NIH—
Wellcome Trust—
European Research Council—
Funder breakdown is a member featureSign up free to unlock
How much of the research on Advanced Surface Polishing Techniques is open access?
ScholarIQopen access share
13%OPEN ACCESS
Gold
0%
Green
7%
Hybrid
0%
Bronze
7%
Closed
87%
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